HERMES-EPITEK CORPORATION
Patent Owner
Stats
- 24 US PATENTS IN FORCE
- 8 US APPLICATIONS PENDING
- Feb 15, 2018 most recent publication
Details
- 24 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,334 Total Citation Count
- Feb 22, 2008 Earliest Filing
- 18 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2018/0044,792 GAS INJECTOR FOR SEMICONDUCTOR PROCESSES AND FILM DEPOSITION APPARATUSMay 09, 17Feb 15, 18[C23C, H01L, C23F]
2016/0244,876 GAS INJECTOR AND COVER PLATE ASSEMBLY FOR SEMICONDUCTOR EQUIPMENTMay 04, 16Aug 25, 16[C23C]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9855575 Gas injector and cover plate assembly for semiconductor equipmentMay 04, 16Jan 02, 18[C23C, B05B]
9617636 System and method for controlling wafer and thin film surface temperatureAug 31, 15Apr 11, 17[C23C, H01L]
9613875 Method and system for manufacturing semiconductor epitaxy structureJun 27, 16Apr 04, 17[C23C, H01L]
9551569 Apparatus and method for curvature and thin film stress measurementOct 13, 14Jan 24, 17[G02B, G01B]
9427762 Gas injector and cover plate assembly for semiconductor equipmentFeb 21, 14Aug 30, 16[C23C, B05B]
9406536 Method and system for manufacturing semiconductor epitaxy structureJun 29, 15Aug 02, 16[H01L]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2017/0117,136 FABRICATION METHOD OF SEMICONDUCTOR MULTILAYER STRUCTUREAbandonedJan 03, 17Apr 27, 17[H01L]
2016/0293,399 SEMICONDUCTOR MULTILAYER STRUCTURE AND FABRICATION METHOD THEREOFAbandonedApr 03, 15Oct 06, 16[H01L]
2016/0276,472 Semiconductor Device and Manufacturing Method ThereofAbandonedMar 17, 15Sep 22, 16[H01L]
2016/0247,886 SEMICONDUCTOR TEMPLATE AND MANUFACTURING METHOD THEREOFAbandonedFeb 19, 15Aug 25, 16[H01L]
2016/0047,844 PROBE CARD STRUCTURE, ASSEMBLING METHOD THEREOF AND REPLACING METHOD THEREOFAbandonedAug 14, 15Feb 18, 16[G01R, H05K]
2014/0125,371 STAND ALONE MULTI-CELL PROBE CARD FOR AT-SPEED FUNCTIONAL TESTINGAbandonedOct 19, 13May 08, 14[G01R]
2014/0073,138 METHOD FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS THEREOFAbandonedSep 12, 12Mar 13, 14[H01L]
2013/0269,612 Gas Treatment Apparatus with Surrounding Spray CurtainsAbandonedApr 16, 12Oct 17, 13[C23C, B05B]
2013/0220,222 Gas Distribution Apparatus with Heat Exchanging ChannelsAbandonedFeb 23, 12Aug 29, 13[C23C, B05C]
2013/0082,728 CIRCUIT-TEST PROBE CARD AND PROBE SUBSTRATE STRUCTURE THEREOFAbandonedDec 06, 11Apr 04, 13[G01R]
2013/0053,996 METHOD OF PROGRAMMING RECIPE THROUGH GUI AND MEDIA RECORDING THE SAMEAbandonedAug 30, 11Feb 28, 13[G06F]
2012/0085,747 HEATER ASSEMBLY AND WAFER PROCESSING APPARATUS USING THE SAMEAbandonedOct 07, 10Apr 12, 12[H05B]
2010/0055,330 Epitaxy Processing System and Its Processing MethodAbandonedAug 28, 08Mar 04, 10[B05C, B05D]
2009/0211,707 APPARATUS FOR GAS DISTRIBUTION AND ITS APPLICATIONSAbandonedFeb 22, 08Aug 27, 09[C23C, H01L]
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